单模近圆光斑红光半导体激光器的设计与制备
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重庆光电技术研究所

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Design and Fabrication of a Single-Mode Red Semiconductor Laser with Near-Circular Beam Spot
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Chongqing Optoelectronics Research Institute

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    摘要:

    设计、仿真并制备了一种近圆光斑单模红光半导体激光器,适用于对单模和高分辨率有迫切需求的近眼显示设备。通过计算本征模式的近远场分布,优化了外延结构和脊波导的几何参数,论证了激光器单模工作的必要条件,以及发散角的控制方法,最后制备样品验证了理论设计。所制备的激光器为单模工作,功率可达235 mW,阈值电流约51 mA,近圆光斑的快轴和慢轴发散角分别为13.6°和9.5°,能够满足近眼显示设备对于单模和高分辨率的要求,为其发展提供了必要支撑。

    Abstract:

    We report the design, simulation, and fabrication of a single-mode red semiconductor laser featuring a near-circular beam spot, tailored for near-eye display applications with demands on single-mode operation and high resolution. The near- and far-field distributions of eigenmodes were analyzed to optimize epitaxial structure and ridge waveguide. Conditions required for stable single-mode operation as well as strategies for divergence angle control were theoretically established. Prototype devices were subsequently fabricated to validate the design. The realized laser exhibits robust single-mode operation with an output power of 235 mW and a threshold current of approximately 51 mA. Near-circular beam demonstrates fast- and slow-axis divergence angles of 13.6° and 9.5°, respectively, fulfilling the single-mode operation and high resolution requirements of near-eye display systems and providing critical support for their further development.

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  • 收稿日期:2025-09-15
  • 最后修改日期:2025-09-30
  • 录用日期:2025-09-30
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