激光参数调控与化学金属协同优化的LIG导电性能研究
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北京信息科技大学

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国家自然科学基金资助项目(61771060);北京市教育委员会科研计划项目资助(KZ20231123221) ;北京市新世纪百千万人才工程培养资助项目(2019A20);现代测控技术教育部重点实验室资助(2024202101);北京信息科技大学北京市传感器重点实验室资助(2024202108)


Laser parameter modulation and chemical-metal co-optimisation for LIG conductivity studies
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Beijing University of Information Science and Technology,Beijing Key Laboratory of Sensors

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The National Natural Science Foundation of China Grant (61771060); R&D Program of Beijing Municipal Education Commission(KZ20231123221);The Beijing New Century Hundred Million Talents Project Cultivation Grant (2019A20); The Key Laboratory of Modern Measurement and Control Technology, Ministry of Education Grant ( 2024202101); Supported by Beijing Key Laboratory of Sensors of Beijing Information Science and Technology University (2024202108)

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    摘要:

    本研究针对激光诱导石墨烯(LIG)导电性能优化问题,系统探究了激光参数调控、聚酰亚胺(PI)化学预处理及金属溅射对LIG电阻特性及表面形貌的影响规律。实验结果表明:在10.87~46.25J/mm2能量密度范围内,LIG电阻值与激光能量密度呈显著负相关;采用2mol/L NaOH与0.0282 mol/L AgNO3溶液对PI基底进行预处理后,所得LIG的电阻值较原始样品降低两个数量级,性能优于其他对比方案;进一步在预处理样品表面溅射铂(Pt)金属层最大可以降低15.07%的电阻值。本研究为高性能LIG的制备提供了有效的工艺优化策略。

    Abstract:

    In this study, the effects of laser parameter modulation, polyimide (PI) chemical pretreatment and metal sputtering on the electrical resistance characteristics and surface morphology of LIG were systematically investigated for the optimisation of laser-induced graphene (LIG) conductivity. The experimental results show that the resistance value of LIG is significantly negatively correlated with the laser energy density in the energy density range of 10.87~46.25 J/mm2, and the resistance value of the LIG obtained from the pretreatment of the PI substrate with 2 mol/L NaOH and 0.0282 mol/L AgNO3 solution is reduced by two orders of magnitude compared with that of the original sample, which is superior to the performance of the other comparative solutions; Further sputtering of a platinum (Pt) metal layer on the surface of the pretreated sample can reduce the resistance value by a maximum of 15.07%. This study provides an effective process optimisation strategy for the preparation of high-performance LIGs.

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  • 收稿日期:2025-08-07
  • 最后修改日期:2025-08-12
  • 录用日期:2025-08-14
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