基于硅上锗平台的中红外重建型光谱仪
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(上海大学微电子学院,上海 201800)

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崔浩祥(1999-),男,硕士研究生,主要从事片上重建型光谱仪研究;郑少南(1991-),女,博士,副教授,研究方向为微纳光电子器件、集成光学、中红外光子器件。

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TN29

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Mid-infrared Reconstructive Spectrometer on a Germanium-on-Silicon Platform
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(School of Microelectronics,Shanghai University,Shanghai 201800,CHN)

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    摘要:

    中红外波段(2. 5~25 μm)包含了特征频率区(2.5~7.7 μm)和分子指纹区(7. 7~

    Abstract:

    The mid-infrared band(2. 5~25 μm)includes both the characteristic frequency region(2.5~7.7 μm)and the molecular fingerprint region(7. 7~16. 7 μm),making it ideal for spectral detection and molecular sensing applications. Reconstructive spectrometers based on guided wave optics have demonstrated excellent performance in the near-infrared and visible ranges. However, achieving reconstructive spectrometers with large bandwidth, high resolution, and compactness in the mid-infrared remains a significant challenge. In this study,we developed an on-chip reconstructive spectrometer based on cascaded Fabry-Perot(F-P)cavity filters fabricated on a germanium-on-silicon mid-infrared platform. A waveguide Bragg grating serves as the reflector for each F-P cavity. The spectrometer integrates 63 cascaded F-P filters,selected through a specific algorithm. Simulation indicate a resolution of 0. 4 nm over a 600 nm bandwidth near 4 μm,yielding a bandwidth-to-resolution ratio of 1 500 without any additional tuning.

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崔浩祥,侯亚彤,钟其泽,郑少南,胡挺.基于硅上锗平台的中红外重建型光谱仪[J].半导体光电,2025,46(4):666-672. CUI Haoxiang, HOU Yatong, ZHONG Qize, ZHENG Shaonan, HU Ting. Mid-infrared Reconstructive Spectrometer on a Germanium-on-Silicon Platform[J].,2025,46(4):666-672.

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  • 收稿日期:2025-04-22
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  • 在线发布日期: 2025-08-25
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