基于 SOI超表面的全斯托克斯偏振探测器研究
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(上海大学微电子学院,上海 201800)

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俞惟明(1999-),男,硕士研究生,主要研究基于超表面的全斯托克斯偏振探测器;赵兴岩(1991-),女,博士,副教授,主要研究方向为集成光电子器件与芯片。

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TN215

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上海市自然科学基金项目(24ZR1425000,24ZR1425000)。


Study on a Full-Stokes Polarization Photodetector Based on a Silicon-On-Insulator Metasurface
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(School of Microelectronics,Shanghai University,Shanghai 201800,CHN)

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    摘要:

    偏振探测作为表征光与物质相互作用的关键技术手段,近年来在生物医学成像、高精度光学测量及军事目标识别等领域展现出重要的应用前景。针对光电系统集成化与微型化的发展需求,文章提出一种基于绝缘体上硅(SOI)平台的全斯托克斯偏振探测器。该方案通过将 SOI器件的 500 nm器件层局部设计成超表面结构,并设计为 pin型光电探测器以实现单片集成,成功解决了传统偏振探测系统体积庞大、集成度低的技术瓶颈。结果表明,所设计的探测器在 780 nm工作波长下展现出优异的性能,手性超表面像素的圆二色性达到 42%,线性超表面像素的消光比高达 10 dB。值得注意的是,该器件实现了高精度的斯托克斯参数重构,其中 S1,S2和 S3参数的平均重构误差分别为 0. 30%,0. 85%和 11. 17%。该研究不仅为集成化偏振探测系统的设计提供了新思路,同时也展现了超表面技术在光电集成领域的巨大应用潜力。

    Abstract:

    Polarimetric detection,a critical technical approach for characterizing light – matter interactions,has been widely applied in biomedical imaging,high-precision optical metrology,and military target identification in recent years. To address and fulfill the development requirements for integration and miniaturization of optoelectronic systems, an innovative full-Stokes polarimetric detector,based on the silicon-on-insulator(SOI) technology,is proposed in this study. In this design,a 500 nm-thick SOI device layer is selectively patterned to form a metasurface structure and simultaneously engineered as a pin photodetector. This approach enables monolithic integration that effectively addresses the critical limitations of conventional polarization detection systems,i. e.,their bulky form factors and poor integration capability. The results demonstrate excellent device performance at the operational wavelength of 780 nm,where the chiral metasurface pixels exhibit circular dichroism of 42%,and the linear metasurface pixels achieve an extinction ratio of 10 dB. Notably,high-accuracy Stokes parameter reconstruction is accomplished,with average measurement errors of 0. 30%,0. 85%,and 11. 17% for the parameters S1,S2,and S3,respectively. This study provides a novel design strategy for integrated polarimetric systems as well as highlights the considerable application potential of metasurface technology in the field of optoelectronic integration.

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俞惟明,赵兴岩.基于 SOI超表面的全斯托克斯偏振探测器研究[J].半导体光电,2025,46(3):432-437. YU Weiming, ZHAO Xingyan. Study on a Full-Stokes Polarization Photodetector Based on a Silicon-On-Insulator Metasurface[J].,2025,46(3):432-437.

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  • 收稿日期:2025-04-22
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  • 在线发布日期: 2025-07-28
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