EBCMOS中电子倍增层信噪比理论分析
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长春理工大学

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国家自然科学基金资助项目(项目号:U2141239)


Theoretical analysis on the signal-to-noise ratio of the multiplication layer in EBCMOS
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Changchun University of Science and Technology

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National Natural Science Foundation of China (U2141239)

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    摘要:

    基于光子传输理论和电子与半导体相互作用理论,建立了电子轰击互补金属氧化物(EBCMOS)中电子倍增层的二次电子波动性引起的增益噪声形成机制模型。采用蒙特卡罗模拟方法,计算了二次电子的信噪比,重点分析了入射电子能量、钝化层种类与厚度、电子倍增层厚度与掺杂浓度等系统参数对增益噪声的影响。结果表明,当使用Al2O3钝化层材料,并通过减薄钝化层厚度、降低掺杂浓度、减少电子倍增层厚度以及降低工作温度等一系列措施,能够有效提高电子倍增层的信噪比使其达到75.35 dB。本文的研究成果对EBCMOS电子倍增层的制备具有理论指导意义。

    Abstract:

    Based on photon transport theory and the theory of electron-semiconductor interactions, a model for the formation mechanism of gain noise caused by the secondary electron fluctuations in the electron multiplying layer of Electron Bombarded Complementary Metal-Oxide-Semiconductor (EBCMOS) devices is established. Using the Monte Carlo simulation method, the signal-to-noise ratio (SNR) of secondary electrons is calculated, with a focus on analyzing the impact of system parameters, including incident electron energy, passivation layer type and thickness, electron multiplying layer thickness, and doping concentration, on gain noise. The results indicate that by using Al2O3 as the passivation layer material, and implementing a series of measures such as reducing passivation layer thickness, lowering doping concentration, decreasing electron multiplying layer thickness, and lowering operating temperature, the SNR of the electron multiplying layer can be effectively improved to 75.35 dB. The findings of this study provide theoretical guidance for the preparation of the EBCMOS electron multiplying layer.

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  • 收稿日期:2024-12-24
  • 最后修改日期:2024-12-24
  • 录用日期:2025-02-17
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