基于纳米胺结构保护层的多波段高反射Ag基膜系制备
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作者单位:

1.中国科学院大学 光电学院;2.中国科学院光电技术研究所

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基金项目:

国家自然科学基金项目(面上项目,重点项目,重大项目)(62005290)


Preparation of multi-band high reflectivity silver-based films based on nanolaminate protection layers
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Affiliation:

Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu

Fund Project:

The National Natural Science Foundation of China (General Program, Key Program, Major Research Plan)(62005290)

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    摘要:

    Ag基膜系具有在可见到近红外波段最高的反射率,但Ag的环境稳定性较差,易受腐蚀导致反射率降低。采用离子束辅助电子束蒸发沉积(IAD)方式制备了不同厚度比例的Ta2O5-SiO2纳米胺薄膜,计算出有效折射率和膜层残余应力,选用Ta2O5厚度占比为75%的纳米胺薄膜,进一步设计制备了纳米胺结构保护层Ag基膜系和常规两层式结构保护层Ag基膜系,实现了多波段高反射率目标,并且两种Ag基膜系的残余应力相近。在24h湿热实验后,纳米胺结构保护层Ag基膜系的反射率红移量小于常规两层式结构保护层Ag基膜系;在144h湿热实验后,纳米胺结构保护层Ag基膜系表面缺陷腐蚀程度小于常规两层式结构保护层Ag基膜系,结合FIB制样后TEM观察结果,表明纳米胺结构保护层具有更高的致密度,能够为Ag基膜系提供更优良的环境稳定性。

    Abstract:

    The silver-based films have highest reflectivity from VIS to IR, however, the environmental stability of Ag thin films is poor and susceptible to co2osion with reflectivity reduction. Different thickness ratio of Ta2O5-SiO2 nanolaminate films were prepared by ion beam assisted electron beam evaporation (IAD). The effective refractive index and residual stress of the films were calculated. Furthermore, nanolaminate protection layers and conventional two-layers type protection layers were designed and fabricated on silver layer after selection of nanolaminate films with Ta2O5 thickness accounting for 75%. Multi-band high reflectivity targets were achieved and the residual stress of the two silver-based films were similar. After 24 hours of humidity test, the reflectance redshift of nanolaminate protection silver-based films was less than conventional two-layers type protection silver-based films. After 144 hours of humidity test, compared with conventional two-layers type protection silver-based films, the corrosion defects color depth of nanolaminate protection silver-based films was less and the defects size of nanolaminate protection silver-based films was smaller. Combined with TEM observation results after combining FIB sample preparation, the nanolaminate protection layers possessed higher density and it could perform better in aspect of environmental durability.

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历史
  • 收稿日期:2023-04-19
  • 最后修改日期:2023-04-19
  • 录用日期:2023-05-05
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