(重庆光电技术研究所, 重庆 400060)
(Chongqing Optoelectronics Research Institute, Chongqing 400060, CHN)
A 90° optical hybrid based on an InP 4×4 multimode interference waveguide (MMI) was designed and fabricated. The optical hybrid was fabricated with InGaAsP waveguide layer, InP cladding layer and InP substrate. The width of the single mode waveguide was set to be 2.6μm, and the length and width of MMI were set to be 844 and 20μm, respectively. Three dimensional beam propagation method (3D BPM) was used to simulate and analyze the process error tolerance of refractive index, thickness, width and length of wavwguide materials. It is found that optical hybrid’s insertion loss is less than 1dB and phase deviation is less than 5° in the wavelength range of 1535~1565nm, which is consistent with the simulation result.
陈伟,崔大建,黄晓峰,周浪,肖入彬,吴维,刘昆,左欣,王立,严银林.基于多模干涉波导结构的90°光混频器设计与制作[J].半导体光电,2023,44(4):515-518. CHEN Wei, CUI Dajian, HUANG Xiaofeng, ZHOU Lang, XIAO Rubin, WU Wei, LIU Kun, ZUO Xin, WANG Li, YAN Yinlin. The Design and Fabrication of 90° Optical Hybrid Based on MMI[J].,2023,44(4):515-518.复制