基于衍射色散原理的光谱共焦位移测量技术综述
作者:
作者单位:

(1. 中国科学院大学, 北京 100000;2. 中国科学院光电技术研究所, 成都 610000)

作者简介:

王玉龙(1996-),男,四川省成都市人,博士研究生,从事精密几何量精密测试技术等方面的研究;

通讯作者:

中图分类号:

TH822

基金项目:


Review of Chromatic Confocal Displacement Measurement Techniques Based on Diffractive Dispersion
Author:
Affiliation:

(1. University of Chinese Academy of Sciences, Beijing 100049, CHN;2. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, CHN)

Fund Project:

  • 摘要
  • |
  • 图/表
  • |
  • 访问统计
  • |
  • 参考文献
  • |
  • 相似文献
  • |
  • 引证文献
  • |
  • 资源附件
  • |
  • 文章评论
    摘要:

    位移检测技术是几何量精密测量的基础,在当代精密制造领域应用广泛。光谱共焦位移测量技术具有对环境杂散光、被测物倾斜、材料类型不敏感,测量频率高以及分辨率高等优点,可以检测位移量、表面粗糙度、三维形貌以及单层或多层透明材料的厚度,在精密位移测量领域中占据重要地位。近年来,利用衍射光学元件提高光学系统性能的光谱共焦测量技术被广泛研究。文章综述了基于衍射色散原理的光谱共焦位移测量技术的研究进展。首先,介绍了光谱共焦位移测量原理和衍射光学元件的色散特性; 其次,阐述了基于衍射色散原理的光谱共焦位移测量技术的发展历史及研究进展;最后展望了该技术的发展趋势。

    Abstract:

    With the rapid development of precision manufacturing industry, the demand for precision measurement technology is increasing fast. Displacement detection technology is the basis of geometric precision measurement and is widely used in the field of contemporary precision manufacturing. The chromatic confocal displacement measurement system has the advantages of insensitivity to stray light, tilt of the measured object, and materials type, as well as high measuring frequency and high resolution. It can detect displacement, surface roughness, three-dimensional topography and the thickness of single-layer or multi-layer transparent materials. So it plays an significant role in the field of precision displacement measurement. In recent years, the chromatic confocal measurement technology using diffractive optical elements to improve the performance of optical system has been widely studied by domestic and foreign scholars. In this paper, the research progress of chromatic confocal displacement measurement based on diffraction dispersion principle was summarized. Firstly, the principle of chromatic confocal displacement measurement and the characteristics of diffractive optical elements were introduced. Then, the development history and research progress of chromatic confocal displacement measurement technology based on diffractive dispersion principle were described. Finally, the development trend of this technology was prospected.

    参考文献
    相似文献
    引证文献
引用本文

王玉龙,李杰,侯溪,曹学东,陈林,杨文博.基于衍射色散原理的光谱共焦位移测量技术综述[J].半导体光电,2023,44(1):1-7. WANG Yulong, LI Jie, HOU Xi, CAO Xuedong, CHEN Lin, YANG Wenbo. Review of Chromatic Confocal Displacement Measurement Techniques Based on Diffractive Dispersion[J].,2023,44(1):1-7.

复制
分享
文章指标
  • 点击次数:
  • 下载次数:
  • HTML阅读次数:
  • 引用次数:
历史
  • 收稿日期:2022-11-14
  • 最后修改日期:
  • 录用日期:
  • 在线发布日期: 2023-04-07
  • 出版日期:

漂浮通知

①《半导体光电》新近入编《中文核心期刊要目总览》2023年版(即第10版),这是本刊自1992年以来连续第10次被《中文核心期刊要目总览》收录。
②目前,《半导体光电》已入编四个最新版高质量科技期刊分级目录,它们分别是中国电子学会《电子技术、通信技术领域高质量科技期刊分级目录》(T3)、中国图象图形学学会《图像图形领域高质量科技期刊分级目录》(T3)、中国电工技术学会《电气工程领域高质量科技期刊分级目录》(T3)和中国照明学会《照明领域高质量科技期刊分级目录》(T2)。
③关于用户登录弱密码必须强制调整的说明
④《半导体光电》微信公众号“半导体光电期刊”已开通,欢迎关注