National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Shanghai Jiao Tong University,Shanghai
Micro-electro-mechanical (MEMS) gyroscope is a kind of solid wave gyroscope, which is often fabricated by micro-nano fabrication technology. MEMS resonator gyroscopes have attracted extensive attention because of their small size, low power consumption, low cost, and batch fabrication. Since the birth of the first hemispherical resonator gyroscope in the world in 1975, the structure topology of the MEMS gyroscope has undergone a transformation from three-dimensional structure to two-dimensional structure. In this paper, the development of MEMS resonator gyroscope is summarized based on the topology. Finally, the current problems are analyzed and future development is prospected.