Department of Micro-Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University
The National Natural Science Foundation of China (61574093);
In this paper, a novel wave-like disk resonator gyroscope (WDRG) with high mechanical sensitivity and low bias stability has been proposed and developed. The structure is designed by turning the traditional disk resonator gyroscope (DRG) rings into wavy rings, which has the potential to provide a higher thermo-elastic quality factor. In addition, the WDRG has higher fabrication error immunity compared with the traditional DRG. The performance of WDRG is further improved by optimizing the structural parameters. The influence of the main structural parameters on the WDRG’s critical performances is given through finite element method (FEM). The new prototype's optimized thermal- elastic quality factor, mechanical sensitivity, and bias stability are 450k, 1.05 μm/(°/s), and 0.076 °/h, respectively. Compared with traditional DRG, the bias stability is significantly decreased by 90%, and the thermal- elastic quality factor and mechanical sensitivity are considerably improved by 215% and 950%, respectively.