本文设计了一种基于光学FP腔的声波传感器的结构,分析了其传感原理,并用实验检测了其关键指标。实验结果表明,传感器在声波频率5 ~ 1000 Hz的范围内,灵敏度保持在-119.98 ~ -120.99 dB re 1 rad/μPa范围内,灵敏度变化小于1.01 dB,具有较宽的响应平坦区间；在频率150 Hz,声压0.18 ~ 5.30 Pa的范围内工作稳定,且声压和相位之间具有良好的线性关系。
Abstract:
In this paper, the structure of an acoustic sensor based on optical FP cavity is designed, its sensing principle is analyzed, and its key indexes are tested by experiments. The experimental results show that the sensitivity of the sensor remains in the range of -119.98 ~ -120.99 dB re 1 rad/μPA in the range of sound wave frequency of 5 ~ 1000 Hz, and the sensitivity change is less than 1.01 dB, with a wide response flat range; It works stably at the frequency of 150 Hz and the sound pressure of 0.18 ~ 5.30 Pa, and there is a good linear relationship between the sound pressure and phase.
