National Key Laboratory of Science and Technology on Micro/Nano Fabrication
A capacitive artificial sensor that enables two-dimensional wind velocity measurement is designed. The sensor detects flow velocity by differential capacitance, and the handle layer of wafer corresponding to the sensor motion structure is completely etched. The relationship between the differential capacitance of the sensor and the wind speed is obtained analytically by multi-physics field simulation of fluid-solid-electrostatics field using finite element analysis software. With the theoretical accuracy of the capacitance sensor AD7746, the wind speed sensitivity of the sensor is calculated to be 0.25 mm/s. In addition, a process flow for the microfabrication of the sensor based on SOI wafer is designed.