Department of Solid State Image Sensor,No.44 Research Institute,CETC
Aiming at the requirements of avalanche photodiode (APD) focal plane in 3D-lidar imaging, a 2×128 silicon linear-mode APD focal plane module is prepared. It consists of silicon based APD focal plane array, readout circuit and refrigeration package shell. APD pixels adopt the reach through structure. high fill factor is achieved by large size micro-lens arrays. crosstalk suppression is realized through doping concentration optimization of isolation ring. Though parameter adjustment of ion implantation, high uniformities of breakdown voltage and current are realized. low noise spanning resistance amplifier circuit with large bandwidth and high precision timing circuit are designed to realize narrow pulse width and high sensitivity detection. Air tightness package are carried out and the refrigeration temperature difference is over 40K. The test results show that the detection threshold optical power of focal plane can reach 3.24nW, the response non-uniformity is 3.8%, crosstalk is 0.14%, and the minimum time resolution can reach 0.25NS, realizing the simultaneous output function of intensity information and time information. This detector has been applied in lidar.