ZnSnO/AgNW双层透明电极的制备及性能研究
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(1. 天津职业技术师范大学 汽车与交通学院, 天津 300222;2. 天津大学 微电子学院, 天津 300072)

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石和平(1985-),男,博士,讲师,主要研究方向为半导体薄膜;

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TN304.9

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天津市教委科研计划项目(2021KJ016);国家自然科学基金项目(52175525).*通信作者:于仕辉 E-mail:ysh728@126.com


Investigation on Preparation and Performance of ZnSnO/AgNW Bi-layer Transparent Electrodes
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(1. School of Automation and Electrical Engineering, Tianjin University of Technology and Education, Tianjin 300222, CHN;2. Department of Electrical Engineering and Automation, Luoyang Institute of Science and Technology, Luoyang 471023, CHN;3. School of Microelectronics, Tianjin University, Tianjin 300072, CHN)

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    摘要:

    利用旋涂银纳米线和磁控溅射ZnSnO薄膜相结合的方法,实现了高性能ZnSnO/AgNW双层透明电极的制备。采用X射线衍射仪和扫描电子显微镜对电极的结构和形貌进行了表征分析,利用紫外可见分光光度计和四探针测试仪分别对ZnSnO/AgNW双层透明电极的电学和光学性能进行了表征。结果表明,制备的ZnSnO/AgNW双层透明电极具有优异的电学和光学性能,在透过率为88.1%时,其方阻为12.3Ω/□,品质因子高达231。在5.0mm的曲率半径下,对ZnSnO/AgNW双层透明电极进行了1000次弯曲测试,其电阻仅增加了13%,表明ZnSnO/AgNW双层透明电极具有优异的柔性性能。此外,ZnSnO/AgNW双层透明电极经过20次胶带粘附测试和高温高湿测试后,方阻都基本保持不变,这说明ZnSnO/AgNW双层透明电极具有优异的粘附性以及抗氧化性。

    Abstract:

    High-performance ZnSnO/AgNW bi-layer transparent electrode was prepared by the processes of spin coating and magnetron sputtering. The morphology and phase structure of ZnSnO/AgNW bi-layer electrode were characterized and analyzed by X-ray diffractometer and scanning electron microscope, and the electrical and optical properties of ZnSnO/AgNW bi-layer transparent electrode were characterized by UV-visible spectrophotometer and four-probe tester, respectively. The experimental results show that the ZnSnO/AgNW bi-layer transparent electrode displays excellent electrical and optical properties. Under the optimal conditions, the square resistance is 12.3Ω/□ at transmittance of 88.1%, while the quality factor is as high as 231. The ZnSnO/AgNW bi-layer transparent electrode is tested for 1000 bends at a curvature radius of 5.0mm, and its resistance increased by only 13%, demonstrating its excellent flexibility. In addition, the square resistance remained basically unchanged after 20 tape adhesion tests and high temperature and humidity tests, indicating its excellent adhesion and oxidation resistance.

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石和平,张丽珠,于仕辉. ZnSnO/AgNW双层透明电极的制备及性能研究[J].半导体光电,2022,43(4):797-801. SHI Heping, ZHANG Lizhu, YU Shihui. Investigation on Preparation and Performance of ZnSnO/AgNW Bi-layer Transparent Electrodes[J].,2022,43(4):797-801.

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  • 收稿日期:2022-03-17
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  • 在线发布日期: 2022-09-16
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