基于柔性铰链的FBG三维加速度传感器
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(武汉理工大学 光纤传感技术与网络国家工程研究中心, 武汉 430070)

作者简介:

严超凡(1990-),男,湖北省天门市人,硕士研究生,研究方向为光纤传感技术;

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中图分类号:

TN253;TP212.14

基金项目:

国家自然科学基金项目(51975442).*通信作者:戴玉堂E-mail:daiyt68@163.com


FBG Three-Dimensional Acceleration Sensor Based on Flexible Hinge
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(National Engin. Research Center of Fiber Optic Sensing Technol. and Networks, Wuhan University of Technol., Wuhan 430070, CHN)

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    摘要:

    针对振动测量中三维振动信号测量需要,基于柔性铰链设计了一种光纤光栅(FBG)三维加速度传感器。构建了传感器拾振机构的振动模型,介绍了传感器的结构模型和测量原理,推导了传感器谐振频率和灵敏度理论公式,建立了拾振机构的数学模型,并用MATLAB对传感器拾振机构关键尺寸参数进行优化设计。根据优化后尺寸制作了传感器,通过振动实验对其进行性能测试。实验结果表明:该传感器在X轴、Y轴和Z轴方向的谐振频率分别为673,667和1376Hz,工作频率区间分别为0~220Hz,0~220Hz和0~450Hz,灵敏度分别为72.3,70.2和83.1pm/g。所设计的传感器具有较好的横向抗干扰能力,能够满足三维振动信号测量的要求。

    Abstract:

    To meet the needs of three-dimensional vibration signal measurement in vibration measurement, a fiber Bragg grating three-dimensional acceleration sensor was designed based on flexible hinge. The vibration model of the pickup mechanism of the sensor was constructed, the structural model and measurement principle of the sensor were introduced, the theoretical formulas for the resonant frequency and sensitivity of the sensor were deduced, the mathematical model of the pickup mechanism was established, and the key dimension parameters of the pickup mechanism of the sensor were optimized and designed by MATLAB. The sensor was fabricated according to the optimized dimension, and its performance was tested by vibration experiments. The experimental results show that the resonant frequencies of the sensor in the X-axis, Y-axis and Z-axis directions are 673,667 and 1376Hz, respectively, the operating frequency ranges are 0~220Hz, 0~220Hz and 0~450Hz, respectively, and the sensitivities are 72.3, 70.2 and 83.1pm/g, respectively. The designed sensor has good lateral anti-interference degree and can meet the requirements of three-dimensional vibration signal measurement.

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严超凡,戴玉堂,杨雨微,罗开彦.基于柔性铰链的FBG三维加速度传感器[J].半导体光电,2022,43(4):697-703. YAN Chaofan, DAI Yutang, YANG Yuwei, LUO Kaiyan. FBG Three-Dimensional Acceleration Sensor Based on Flexible Hinge[J].,2022,43(4):697-703.

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  • 收稿日期:2022-05-12
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  • 在线发布日期: 2022-09-16
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