1.松山湖材料实验室;2.广州大学 物理与材料科学学院;3.五邑大学 智能制造学部;4.深圳市人工智能与机器人研究院
1.Songshan Lake Materials Laboratory;2.School of Physics and Materials Science, Guangzhou University;3.School of Intelligent Manufacturing,Wuyi University;4.Shenzhen Institute of Artificial Intelligence and Robotics for Society
Helical drilling experiment of SiC ceramic was carried out by femtosecond laser. Effect of energy density on the processing morphology and shape of micro-hole in material was studied. The laws of variation of diameter, circularity and taper of micro-hole with laser machining parameters were analyzed. The experimental results showed that micro-hole at entrance was less affected by energy density in comparison with exit. Higher energy density was conducive to improve the processing quality of micro-hole. Near cylindrical micro-hole of SiC ceramic with diameter < 250 μm, circularity > 0.95 and taper < 1° was obtained in this study. It was found that a certain degree of oxidation existed on the surface of material by detecting the machining zone. Reasons for changes of elemental contents in different processing areas were analyzed.