Interface roughness in the vacuum ultraviolet (VUV) multilayer film system causes the scattering loss to hinder the realization of its hypersecretion performance. The influence of interface roughness on its spectral properties is investigated to prepare high-performance VUV optical coating. Antireflection coating with a narrow range of angle of incidence(AOI), antireflection coating with a wide range of AOI, and multilayer high reflection coating at 193nm are designed respectively in this paper. Combined with the theory of effective absorption layer, the rough interface between the multilayer film is equivalent to a thin absorption layer. The changes in the spectral properties of the optical coatings under different root mean square roughness of the interface are considered. The study found that the spectral performance of the optical coatings decreased with the increase of the root mean square roughness of the interface. When the root mean square roughness reaches 4nm, the spectral performance of the antireflection coating with a wide range of AOI and the multilayer high reflection coating degrade by 2.04% and 2.09%, respectively. Interface roughness is still the key factor affecting the preparation of VUV optical coatings with hypersecretion properties.